WITHMEMS

MEMS Mirror Scanner

Products	SPC12	WS75V0S0	WS64V1S1	WS6032	WS1548
Scanner Actuator	2D	1D	1D	1D	1D
Driving principal	Electromagnetic
Resonance frequency［㎑］	28.5 ± 4%	7.1 ± 5%	6.25 ± 5%	6.0 ± 5%	1.5 ± 5%
Drive current［mArms ］	< 90	< 140	< 60	< 25	< 100
Optical scan angle［deg］	H 48 × V 35	30	30	30	40
Power consumption［Wrms］	< 0.3	< 0.55	< 0.12	< 0.03	< 1.0
Effective mirror size［㎜］ (circle, ellipse type)	Φ1.2	Φ5	Φ4	Φ3.2	4.8 × 13.5
Package size ［㎜］	L11.00x W6.60x H4.72	L15.00x W15.00x H5.34	L15.00x W15.00x H5.34	L15.3x W15.0x H5.6	L15.3x W24.7x H5.6
Reflectivity(Au) ［%@900~1550㎚]	90~93	90~92	90~92	90~92	90~92
Application	Beam Projection Driver Indicator	Lidar Scanner	Lidar Scanner	Lidar Scanner	Lidar Scanner
Module Package