WITHMEMS

MEMS SENSOR SOLUTIONS

㈜위드멤스는 Meta-mobility 시대에 활용도가 급증할 LiDAR에 대응하기 위한 MEMS 방식의 Scanning Mirror와 미래 친환경 수소차 시대에 대비한 수소센서를
개발, 양산하고 있습니다.

MEMS MIRROR SCANNER

FEATURES

· 다양한 공진주파수를 가지는 1D, 2D Scanner
· 전자석방식(Electromagnetic Type)으로 저 비용, 저 전력 및 Quality/Productivity 측면에서 우수
· 설계 단계에서 Simulation을 통한 Dynamic Deformation 최소화

Products	SPC12	WS75V0S0	WS64V1S1	WS6032	WS1548
Scanner Actuator	2D	1D	1D	1D	1D
Driving principal	Electromagnetic
Resonance frequency［㎑］	28.5 ± 4%	7.1 ± 5%	6.25 ± 5%	6.0 ± 5%	1.5 ± 5%
Drive current［mArms ］	< 90	< 140	< 60	< 25	< 100
Optical scan angle［deg］	H 48 × V 35	30	30	30	40
Power consumption［Wrms］	< 0.3	< 0.55	< 0.12	< 0.03	< 1.0
Effective mirror size［㎜］ (circle, ellipse type)	Φ1.2	Φ5	Φ4	Φ3.2	4.8 × 13.5
Package size ［㎜］	L11.00x W6.60x H4.72	L15.00x W15.00x H5.34	L15.00x W15.00x H5.34	L15.3x W15.0x H5.6	L15.3x W24.7x H5.6
Reflectivity(Au) ［%@900~1550㎚]	90~93	90~92	90~92	90~92	90~92
Application	Beam Projection Driver Indicator	Lidar Scanner	Lidar Scanner	Lidar Scanner	Lidar Scanner
Module Package

Products

SPC12

WS75V0S0

WS64V1S1

WS6032

WS1548

Scanner Actuator

Driving principal

Electromagnetic

Resonance frequency［㎑］

28.5 ± 4%

7.1 ± 5%

6.25 ± 5%

6.0 ± 5%

1.5 ± 5%

Drive current［mArms ］

< 90

< 140

< 60

< 25

< 100

Optical scan angle［deg］

H 48 × V 35

Power consumption［Wrms］

< 0.3

< 0.55

< 0.12

< 0.03

< 1.0

Effective mirror size［㎜］
(circle, ellipse type)

Φ1.2

Φ5

Φ4

Φ3.2

4.8 × 13.5

Package size ［㎜］

L11.00x W6.60x H4.72

L15.00x W15.00x H5.34

L15.3x W15.0x H5.6

L15.3x W24.7x H5.6

Reflectivity(Au)
［%@900~1550㎚]

90~93

90~92

Application

Beam Projection
Driver Indicator

Lidar Scanner

Module Package

Application

· LiDAR, Beam Projector, HUD, Etc.

H2 SENSOR

FEATURES

· Reference부와 Sensing부의 일체화로 Small Form Factor 구현
· 촉매를 사용하지 않음으로 내구성 및 신뢰성 확보

Items	Performance	Etc.
Operation	Continuous or cycle mode	Customize
Bridge Supply Voltage	5V to 8V	Customize
Sensor current	~ 55 mA	-
Sensitivity	10mV/H2 con.	-
Response/Recovery time	25/5 sec.	-
Operational Temperature	-40-125 C	-
Number of package	1	-
Humidity	0-95%RH	-
Module Package

Application

· 수소차, 수소Tank, 수소제조 등

MEMS Sensor Solution

MEMS SENSOR SOLUTIONS

MEMS MIRROR SCANNER

FEATURES

Application

H2 SENSOR

FEATURES

Application

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